Goodrich Supplies Europe’s First MEMS Gyros For Space Navigation
MEMS Processing Links
Wikipedia article about crystalline silicon
Bulk Silicon Material Properties
Various sources of material property information
Standard Wafer Thickness
This chart shows the SEMI standard wafer thickness associated with each wafer diameter.
Input parameters such as wafer diameter, die size, die spacing, and edge exclusion to calculate the total number of whole die per wafer
Carrier Concentration vs. Resistivity (Si, Ge)
Calculates carrier concentration (atoms per cubic cm) and resistivity (Ω-cm)
Crystal Planes in Semiconductors – Miller Index
Crystal lattice planes can be characterized by a three digit number called a Miller Index.
Silicon Crystallography Visualization Software
Provides insight into visualization of Silicon’s diamond cubic unit cell structure
Wafer Orientation vs. Wafer Flats
One or two flats ground into the edge of the wafer indicate crystal orientation, and generally applies to wafers 125mm in diameter or smaller
Uses variables, such as time, temperature, desired thickness, and ambient conditions to calculate outcomes for thermal oxides
Silicon Dioxide Thickness – Color Chart
Silicon dioxide film thickness can be determined visually by film color, especially if the number of fringe lines is known.
Silicon Nitride Thickness – Color Chart
Silicon nitride film thickness can be determined visually by film color, especially if the number of fringe lines is known.
The RCA clean is a widely used method to remove organic and metallic residues.