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Silicon Information
Wikipedia article about crystalline silicon
http://en.wikipedia.org/wiki/Silicon
Bulk Silicon Material Properties
Various sources of material property information
http://www.memsnet.org/material/siliconsibulk/
Standard Wafer Thickness
This chart shows the SEMI standard wafer thickness associated with each wafer diameter.
Wafer_ThickVsDiameter.pdf
Die-Per-Wafer Computation
Input parameters such as wafer diameter, die size, die spacing, and edge exclusion to calculate the total number of whole die per wafer
Carrier Concentration vs. Resistivity (Si, Ge)
Calculates carrier concentration (atoms per cubic cm) and resistivity (Ω-cm)
http://www.solecon.com/sra/rho2ccal.htm
Crystal Planes in Semiconductors – Miller Index
Crystal lattice planes can be characterized by a three digit number called a Miller Index.
Silicon Crystallography Visualization Software
Provides insight into visualization of Silicon’s diamond cubic unit cell structure
http://upload.wikimedia.org/wikipedia/commons/2/22/Diamond_Cubic-F_lattice_animation.gif
Wafer Orientation vs. Wafer Flats
One or two flats ground into the edge of the wafer indicate crystal orientation, and generally applies to wafers 125mm in diameter or smaller
Flat Orientation.pdf
Oxide Thickness
Uses variables, such as time, temperature, desired thickness, and ambient conditions to calculate outcomes for thermal oxides
http://www.lelandstanfordjunior.com/thermaloxide.html
Silicon Dioxide Thickness – Color Chart
Silicon dioxide film thickness can be determined visually by film color, especially if the number of fringe lines is known.
ColorChart_SiliconDioxide.pdf
Silicon Nitride Thickness – Color Chart
Silicon nitride film thickness can be determined visually by film color, especially if the number of fringe lines is known.
ColorChart_SiliconNitride.pdf
RCA Clean
The RCA clean is a widely used method to remove organic and metallic residues.
RCA Clean.pdf